A High-Resolution MEMS Capacitive Force Sensor With Bionic Swallow Comb Arrays for Ultralow Multiphysics Measurement.
Wendi GaoCunlang LiuXiangguang HanLibo ZhaoQijing LinZhuangde JiangDong SunPublished in: IEEE Trans. Ind. Electron. (2023)
Keyphrases
- high resolution
- low resolution
- imaging sensors
- contact force
- laser scanner
- data acquisition
- sensor networks
- remote sensing
- super resolution
- image processing
- field of view
- sensor data
- real time
- high frequency
- high quality
- spatial resolution
- wide field of view
- sonar images
- high resolution images
- image generation
- time of flight
- high speed
- finite element analysis
- motion estimation
- neural network