Login / Signup

Highly Sensitive AIN Surface Acoustic Wave Humidity Sensor Based on Uniform Graphene Oxide Thin Film Formed by Surface Tension.

Xianhao LeJintao PangXuying ChenDongsheng LiZhen XuChao GaoJin Xie
Published in: NEMS (2018)
Keyphrases
  • thin film
  • three dimensional
  • si sio
  • electron microscopy
  • white light interferometry
  • film thickness
  • short circuit
  • d objects
  • surface reconstruction
  • wave propagation