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Highly Sensitive AIN Surface Acoustic Wave Humidity Sensor Based on Uniform Graphene Oxide Thin Film Formed by Surface Tension.
Xianhao Le
Jintao Pang
Xuying Chen
Dongsheng Li
Zhen Xu
Chao Gao
Jin Xie
Published in:
NEMS (2018)
Keyphrases
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thin film
three dimensional
si sio
electron microscopy
white light interferometry
film thickness
short circuit
d objects
surface reconstruction
wave propagation