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Impact of substrate resistance and layout on passivation etch-induced wafer arcing and reliability.

Po LiYung-Cheng WangJing-Wei PengDavid Wei Zhang
Published in: Microelectron. Reliab. (2015)
Keyphrases
  • manufacturing process
  • semiconductor manufacturing
  • high impact
  • database systems
  • databases
  • real world
  • genetic algorithm
  • information systems
  • data structure
  • process control
  • highly reliable