• search
    search
  • reviewers
    reviewers
  • feeds
    feeds
  • assignments
    assignments
  • settings
  • logout

Impact of substrate resistance and layout on passivation etch-induced wafer arcing and reliability.

Po LiYung-Cheng WangJing-Wei PengDavid Wei Zhang
Published in: Microelectron. Reliab. (2015)
Keyphrases
  • manufacturing process
  • semiconductor manufacturing
  • high impact
  • database systems
  • databases
  • real world
  • genetic algorithm
  • information systems
  • data structure
  • process control
  • highly reliable