Self-sensing actuation and damping of a piezoelectric tube scanner for atomic force microscopy.

Stefan Kuiper Georg Schitter

Published in: ECC (2009)

Keyphrases

atomic force microscopy
mathematical model
high voltage
sensor networks
power system
control strategy
dynamic model
sensor fusion
data mining
data acquisition
control algorithm
degrees of freedom
joint space
structured light
real time
data sets
optimal design
low cost
knowledge base
laser beam
databases