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Coupled Simulations in Plasma Physics with the Integrated Plasma Simulator Platform.
Olivier Hoenen
David Coster
S. Petruczynik
Marcin Plóciennik
Published in:
ICCS (2015)
Keyphrases
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simulation platform
simulation environment
high energy
thin film
scanning electron microscope
simulation model
high density
real time
computer science
simulation tool
fully integrated
plasma etching
electric field
clustering algorithm
decision making
computer vision
data mining