Layout decomposition with pairwise coloring for multiple patterning lithography.

Ye Zhang Wai-Shing Luk Hai Zhou Changhao Yan Xuan Zeng

Published in: ICCAD (2013)

Keyphrases

pairwise
neural network
artificial intelligence
decomposition algorithm
similarity measure
higher order
graph matching
decomposition method
data sets
real world
search engine
computer vision
search algorithm
markov random field
x ray
pairwise interactions