Micro FET pressure sensor manufactured using CMOS-MEMS technique.
Ching-Liang DaiPin-Hsu KaoYao-Wei TaiChyan-Chyi WuPublished in: Microelectron. J. (2008)
Keyphrases
- analog to digital converter
- image sensor
- cmos image sensor
- sensor networks
- high speed
- sensor data
- chip design
- real time
- low cost
- focal plane
- analog vlsi
- dynamic range
- neural network
- vlsi circuits
- laser scanner
- sensor fusion
- control system
- circuit design
- power supply
- time of flight
- solid state
- high density
- vision sensor
- low power
- frame rate
- monitoring system
- genetic algorithm
- fiber bragg grating