Login / Signup

Two-dimensional Dopant Profiling and Imaging of 4H Silicon Carbide Devices by Secondary Electron Potential Contrast.

Marco BuzzoMauro CiappaMaria StangoniWolfgang Fichtner
Published in: Microelectron. Reliab. (2005)
Keyphrases
  • three dimensional
  • liquid crystal
  • high resolution
  • low cost
  • imaging devices
  • image analysis
  • high speed
  • imaging systems
  • contrast enhancement
  • semiconductor devices