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Two-dimensional Dopant Profiling and Imaging of 4H Silicon Carbide Devices by Secondary Electron Potential Contrast.
Marco Buzzo
Mauro Ciappa
Maria Stangoni
Wolfgang Fichtner
Published in:
Microelectron. Reliab. (2005)
Keyphrases
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three dimensional
liquid crystal
high resolution
low cost
imaging devices
image analysis
high speed
imaging systems
contrast enhancement
semiconductor devices