A wafer surface defect detection method built on generic object detection network.

Xinyu Wang Xiaoli Jia Chuyi Jiang Sanxin Jiang

Published in: Digit. Signal Process. (2022)

Keyphrases

detection method
face detection
object detection
detection algorithm
computer vision
saliency detection
feature detection
peer to peer
machine learning
multi class
d objects
wireless sensor networks
video sequences
background subtraction
detection rate
detection accuracy
semiconductor manufacturing