A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques.
Hyung-Min ChoKyung-Hee LeePeter ShimAnthony ParkPublished in: ICAIIC (2021)
Keyphrases
- manufacturing process
- process control
- quality control
- manufacturing systems
- product design
- control system
- artificial intelligence
- real time
- discrete event
- expert systems
- product quality
- knowledge representation
- state space
- fuzzy logic
- knowledge based systems
- petri net
- prediction model
- data model
- natural language
- decision making