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Product quality prediction using alarm data : Application to the semiconductor manufacturing process.
Mariam Melhem
Bouchra Ananou
Mustapha Ouladsine
Michel Combal
Jacques Pinaton
Published in:
MED (2017)
Keyphrases
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manufacturing process
product quality
data analysis
knowledge discovery
process control
real time
computer vision
information systems
case based reasoning
knowledge based systems