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Ultraviolet lithography on sloped surfaces utilizing diamond turned holograms.
Ekkard Brinksmeier
Frank Vollertsen
Oltmann Riemer
Michael Koerdt
Axel Meier
Simon Kibben
Jan Möller
Published in:
Prod. Eng. (2013)
Keyphrases
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computer generated
infrared
three dimensional
free form
image data
range data
geometric features
viewpoint
surface features
coordinate systems
surface representation