Planning and scheduling for epitaxial wafer production facilities.
Gabriel R. BitranDevanath TirupatiPublished in: ICRA (1987)
Keyphrases
- production planning
- semiconductor manufacturing
- mixed integer programming model
- wafer fabrication
- production planning and scheduling
- scheduling problem
- production scheduling
- manufacturing process
- operating costs
- scheduling algorithm
- capacity planning
- neural network
- shop floor
- preventive maintenance
- ai planning
- integer programming
- resource allocation
- dynamic scheduling
- production cost
- lot sizing
- process control
- motion planning
- integrated circuit
- thin film
- domain independent
- planning problems
- flexible manufacturing systems
- facility location
- production process
- facility location problem
- production system
- resource constraints
- knapsack problem
- decision support
- planning process