Characterization of interface state density of three-dimensional Si nanostructure by charge pumping measurement.
Chunmeng DouTomoya ShojiKazuhiro NakajimaKuniyuki KakushimaParhat AhmetYoshinori KataokaAkira NishiyamaNobuyuki SugiiHitoshi WakabayashiKazuo TsutsuiKenji NatoriHiroshi IwaiPublished in: Microelectron. Reliab. (2014)