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Fabrication of suspended thin film resonator for application of RF bandpass filter.
Hyun Ho Kim
Byeong Kwon Ju
Yun Hi Lee
Si Hyung Lee
Jeon Kook Lee
Soo Won Kim
Published in:
Microelectron. Reliab. (2004)
Keyphrases
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bandpass
thin film
frequency band
high density
frequency domain
low pass
neural network
multiresolution
digital images
subband
low frequency
chemical vapor deposition