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Plasma etch process virtual metrology using aggregative linear regression.

PKS PrakashSeán F. McLoone
Published in: SoCPaR (2011)
Keyphrases
  • linear regression
  • least squares
  • process control
  • regression methods
  • single view
  • manufacturing process
  • ridge regression
  • nonlinear regression
  • training data
  • virtual environment
  • linear models
  • locally weighted