3D Stackable Vertical Ferroelectric Tunneling Junction (V-FTJ) with on/off Ratio 1500x, Applicable Cell Current, Self-Rectifying Ratio 1000x, Robust Endurance of 10⁹ Cycles, Multilevel and Demonstrated Macro Operation Toward High-Density BEOL NVMs.
J.-Y. LeeF.-S. ChangK.-Y. HsiangP.-H. ChenZ.-F. LuoZ.-X. LiJ.-H. TsaiC. W. LiuMin-Hung LeePublished in: VLSI Technology and Circuits (2023)