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Electromigration and stress-induced voiding in fine Al and Al-alloy thin-film lines.

Chao-Kun HuKenneth P. RodbellTimothy D. SullivanKim Y. LeeDennis P. Bouldin
Published in: IBM J. Res. Dev. (1995)
Keyphrases
  • thin film
  • neural network
  • databases
  • machine learning
  • short circuit