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Synthesis of fault-tolerant supervisor for automated manufacturing systems: a case study on photolithographic process.
Kwang-Hyun Cho
Jong-Tae Lim
Published in:
IEEE Trans. Robotics Autom. (1998)
Keyphrases
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fault tolerant
manufacturing systems
fault tolerance
manufacturing process
manufacturing processes
distributed systems
manufacturing environment
complex systems
load balancing
high availability
database systems
cooperative
software development
state machine
shop floor