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Estimator based multi-eigenmode control of cantilevers in multifrequency Atomic Force Microscopy.

Andreas SchuhIman Soltani BozchalooiIvo RangelowKamal Youcef-Toumi
Published in: ACC (2015)
Keyphrases
  • atomic force microscopy
  • least squares
  • genetic algorithm
  • control system
  • artificial intelligence
  • case study
  • probabilistic model
  • maximum likelihood
  • control strategies