Design and implementation of software system of E-beam lithography based on SEM.
Shuhua WeiJinzhao ZhangLi HanPublished in: NEMS (2009)
Keyphrases
- hardware design
- development kit
- platform independent
- implementation issues
- computer systems
- software design
- design tools
- software development
- design methodology
- user interface
- electron beam
- design patterns
- efficient implementation
- highly modular
- control unit
- embedded software
- aspect oriented
- hardware architecture
- design parameters
- software architecture
- design process
- case study
- hardware implementation
- commercial software
- software environment
- engineering design
- embedded systems
- computer aided
- design concepts
- parallel distributed
- industrial strength
- hardware software partitioning