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Influence of Multilayer Design and Post-Deposition Processing on Effective Photonic Properties of Silicon/Silicon Nitride Multilayer Structures.
Jarmila Müllerová
Pavel Sutta
Pavel Calta
Rostislav Medlín
Marie Netrvalová
Published in:
ICTON (2020)
Keyphrases
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silicon nitride
electrical properties
high quality
thin film
real time
low cost
design decisions
design process
database
artificial intelligence
user interface
data processing
knowledge based systems
user experience
silicon dioxide