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A novel layout decomposition algorithm for triple patterning lithography.

Shao-Yun FangYao-Wen ChangWei-Yu Chen
Published in: DAC (2012)
Keyphrases
  • decomposition algorithm
  • decomposition method
  • electron beam
  • working set
  • equality constraints
  • working set selection
  • recognition algorithm
  • integrated circuit
  • cf loadingtexthtml
  • video sequences
  • support vector