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Investigating a Machine Learning Approach to Predicting White Pixel Defects in Wafers - A Case Study of Wafer Fabrication Plant F.
Dong-Her Shih
Cheng-Yu Yang
Ting-Wei Wu
Ming-Hung Shih
Published in:
Sensors (2024)
Keyphrases
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wafer fabrication
case study
control system
test bed
real time
image pixels
real time control
defect detection
defect classification
integrated circuit
semiconductor manufacturing
evolutionary algorithm
input image
pixel values
pixel level
dispatching rule