Priority mix planning for semiconductor fabrication by fuzzy AHP ranking.
He-Yau KangAmy Hsin-I LeePublished in: Expert Syst. Appl. (2007)
Keyphrases
- plasma etching
- semiconductor devices
- planning problems
- web search
- ranking algorithm
- motion planning
- stochastic domains
- integrated circuit
- search space
- electron beam
- ai planning
- link analysis
- domain independent
- heuristic search
- learning to rank
- data sets
- ranking functions
- high speed
- goal oriented
- mixed initiative
- planning systems
- state space
- plan generation
- reinforcement learning
- search engine
- information retrieval