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Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology
Péter G. Szabó
Balázs Németh
Márta Rencz
Bernard Courtois
Published in:
CoRR (2007)
Keyphrases
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electro mechanical systems
high quality
wireless sensor networks
steady state
low quality
higher quality
case study
face recognition
multiscale
search algorithm
infrared
data quality
quality measures
quality control
finite element analysis