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High-performance Si photonics interposer featuring RF travelling-wave electrode (TWE) via Cu-BEOL.
Yan Yang
Qing Fang
Mingbin Yu
Xiaoguang Tu
Junfeng Song
Rusli
Guo-Qiang Lo
Published in:
OFC (2015)
Keyphrases
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radio frequency
metal oxide
mechanical properties
high reliability
scientific computing
relevance feedback
low cost
electric field
case study
database replication
general purpose
frequency band
electron microscopy
real time
multiscale
three dimensional
databases