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Characterization of interface defects related to negative-bias temperature instability in ultrathin plasma-nitrided SiON/Si systems.

Shinji FujiedaYoshinao MiuraMotofumi SaitohYuden TeraokaAkitaka Yoshigoe
Published in: Microelectron. Reliab. (2005)
Keyphrases
  • room temperature
  • management system
  • building blocks
  • complex systems
  • chemical vapor deposition
  • neural network
  • distributed systems
  • intelligent systems
  • positive and negative
  • electric field
  • graphical user interfaces