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Akitaka Yoshigoe
Publication Activity (10 Years)
Years Active: 2005-2005
Publications (10 Years): 0
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Publications
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Shinji Fujieda
,
Yoshinao Miura
,
Motofumi Saitoh
,
Yuden Teraoka
,
Akitaka Yoshigoe
Characterization of interface defects related to negative-bias temperature instability in ultrathin plasma-nitrided SiON/Si systems.
Microelectron. Reliab.
45 (1) (2005)