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A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm.
Jing Yang
Yi Xu
Hai-Jun Rong
Shaoyi Du
Hongmei Zhang
Published in:
IEEE Access (2020)
Keyphrases
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feature points
image processing
affine transformation
image sequences
defect detection
pairwise
viewpoint
closed form
point correspondences
laser scanner
affine distortion