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Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator.

Majed S. Al-GhamdiAyman M. AlneamySangtak ParkBeichen LiMahmoud E. KhaterEihab M. Abdel-RahmanGlenn R. HepplerMustafa Yavuz
Published in: Sensors (2017)
Keyphrases
  • parameter identification
  • closed loop
  • pulse width
  • control system
  • control scheme
  • flight test
  • fuzzy model
  • control law
  • autoregressive
  • pattern recognition
  • signal processing
  • chaotic systems