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Percolation theory applied to PZT thin films capacitors breakdown mechanisms.

M. T. ChentirJ.-B. JullienB. ValtchanovE. BouyssouL. VenturaC. Anceau
Published in: Microelectron. Reliab. (2009)
Keyphrases
  • thin film
  • theoretical framework
  • short circuit
  • fuzzy logic
  • high density