Enabling Fabrication of PZT Based PiezoMEMS Devices.

Sudhanshu Tiwari Randhir Kumar Ajay Dangi Rudra Pratap

Published in: IEEE SENSORS (2018)

Keyphrases

semiconductor devices
integrated circuit
high density
mobile devices
high speed
embedded devices
databases
neural network
three dimensional
data structure
expert systems
mobile applications
electrical properties