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CO2 concentration using adsorption and nonthermal plasma desorption.
Masaaki Okubo
Tomoyuki Kuroki
Keiichiro Yoshida
Hideaki Yamada
Takuya Kuwahara
Published in:
IAS (2015)
Keyphrases
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high energy
thin film
data processing
low energy
plasma etching
high density
electric field