Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors.
Jiahong ZhangYang ZhaoYixian GeMin LiLijuan YangXiaoli MaoPublished in: Micromachines (2016)
Keyphrases
- high sensitivity
- signal to noise ratio
- fiber bragg grating
- silicon on insulator
- high density
- optical fiber
- noise reduction
- high speed
- real time
- plasma etching
- integrated circuit
- bit error rate
- semiconductor devices
- sensor data
- frequency response
- data fusion
- wiener filter
- matched filter
- multiresolution
- wide range
- computer vision