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Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation.
Keck Voon Ling
Han Yan
Weng Khuen Ho
Khiang Wee Lim
Published in:
IEEE Trans. Ind. Informatics (2010)
Keyphrases
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semiconductor manufacturing
process control
discrete event simulation
accurate estimation
data processing
real time
infrared
database
data sets
trade off
information processing
parameter estimation
estimation algorithm
robust estimation
estimation accuracy