Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation.

Keck Voon Ling Han Yan Weng Khuen Ho Khiang Wee Lim

Published in: IEEE Trans. Ind. Informatics (2010)

Keyphrases

semiconductor manufacturing
process control
discrete event simulation
accurate estimation
data processing
real time
infrared
database
data sets
trade off
information processing
parameter estimation
estimation algorithm
robust estimation
estimation accuracy