A hybrid intelligent approach for output projection in a semiconductor fabrication plant.
Toly ChenYi-Chi WangPublished in: Intell. Data Anal. (2008)
Keyphrases
- hybrid intelligent
- electron beam lithography
- plasma etching
- semiconductor devices
- expert systems
- control system
- real world
- semiconductor manufacturing
- high speed
- social networks
- power consumption
- radon transform
- integrated circuit
- power plant
- projection method
- artificial intelligence
- learning algorithm
- desired output
- information retrieval
- data mining
- neural network