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Room-Temperature Bonding of Wafers with Smooth Au Thin Films in Ambient Air Using a Surface-Activated Bonding Method.
Eiji Higurashi
Ken Okumura
Yutaka Kunimune
Tadatomo Suga
Kei Hagiwara
Published in:
IEICE Trans. Electron. (2017)
Keyphrases
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thin film
room temperature
control system
low cost