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A Fuzzy-Matching Model With Grid Reduction for Lithography Hotspot Detection.
Wan-Yu Wen
Jin-Cheng Li
Sheng-Yuan Lin
Jing-Yi Chen
Shih-Chieh Chang
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2014)
Keyphrases
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management system
computational model
probabilistic model
experimental data
automatic detection
high level
image matching
fuzzy inference system
cost function
probability distribution
feature points
statistical model
formal model