) thin alloys by reactive electron-beam co-evaporation technique.

R. Al Asmar J.-P. Atanas Y. Zaatar J. Podlecki A. Foucaran

Published in: Microelectron. J. (2006)

Keyphrases

electron beam
x ray
integrated circuit
design parameters
semiconductor devices
agent architecture
reactive planning
real time
neural network
genetic algorithm
decision making
search algorithm
control system
numerical simulations