Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units.
Bashar HaddadSen YangLina J. KaramJieping YeNital S. PatelMartin W. BraunPublished in: IEEE Trans Autom. Sci. Eng. (2018)
Keyphrases
- classification systems
- false positives
- classification accuracy
- support vector
- dictionary learning
- pattern recognition
- text classification
- detection rate
- support vector machine
- classification process
- robust detection
- machine learning algorithms
- detection accuracy
- false alarms
- pattern classification
- spam detection
- defect detection
- classification algorithm
- decision rules
- microcalcification clusters
- detection method
- feature selection
- feature extraction
- active learning
- object detection
- image classification
- machine learning
- classification models
- classification scheme
- multi class
- knn
- supervised learning
- feature vectors
- sparse data
- feature space
- preprocessing
- feature selection and classification