A Multi-sensor Big Data fusion Method in Quality Prediction of the Plasma Enhanced Chemical Vapor Deposition Process.
Yiming GuoZhijie XiaZhisheng ZhangMengze SunPublished in: ICBDR (2019)
Keyphrases
- multi sensor
- fusion method
- big data
- data fusion
- quality prediction
- image fusion
- fusion algorithm
- infrared
- information fusion
- data management
- cloud computing
- chemical vapor deposition
- big data analytics
- thin film
- decision level fusion
- data processing
- fusion methods
- multi sensor fusion
- data analysis
- information processing
- knowledge discovery
- high density
- social media
- query processing
- multiresolution
- machine learning