Phase and Carrier Polarity Control of Sputtered MoTe2 by Plasma-induced Defect Engineering.
Chih-Pin LinHao-Hua HsuTuo-Hung HouPublished in: DRC (2020)
Keyphrases
- engineering design
- software engineering
- control system
- neural network
- mechanical engineering
- computational intelligence
- fuzzy logic
- computer science
- artificial intelligence
- control strategy
- data mining
- optimal control
- control method
- thin film
- robot control
- defect detection
- engineering problems
- preprocessing phase
- data sets