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Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography.
Yuelin Du
Qiang Ma
Hua Song
James Shiely
Gerard Luk-Pat
Alexander Miloslavsky
Martin D. F. Wong
Published in:
DAC (2013)
Keyphrases
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transmission line
routing algorithm
network topology
real world
routing problem
routing protocol
shortest path
ad hoc networks
artificial intelligence
electron beam
qos routing
response time
three dimensional
social networks
genetic algorithm
neural network
multicast routing