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Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C.
Shigetaka Watanabe
Yutaka Nakamitsu
Sakurai Junpei
Mizue Mizojiri
Seiichi Hata
Published in:
MHS (2014)
Keyphrases
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scanning devices
electron microscopy
image processing
structured light
neural network
computer vision
scan data
mechanical properties
low cost
electro mechanical systems
database
cross section
steady state
augmented reality
multi view
d objects
three dimensional