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Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing.
Yazan Mohammad Al-Rawashdeh
Mohammad Al Janaideh
Marcel François Heertjes
Published in:
IEEE Trans Autom. Sci. Eng. (2023)
Keyphrases
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semiconductor manufacturing
discrete event simulation
process control
production system
computer graphics
trajectory data
generation process
expert systems
high resolution
data sets
range images
image processing
computer vision
artificial intelligence
phase space
learning algorithm
genetic algorithm