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Evaluating investment-return-based design for AMHS in semiconductor manufacturing system.

Suhua HsiehZhen-Yi Jiang
Published in: J. Intell. Manuf. (2007)
Keyphrases
  • manufacturing systems
  • control structure
  • petri net
  • holonic manufacturing systems
  • cooperative
  • design process
  • flexible manufacturing systems
  • manufacturing processes
  • quality control
  • manufacturing process