Process Control and Management of Etching Process Using Data Mining with Quality Indexes.
Hyeon BaeSungshin KimKwang Bang WooPublished in: ICNC (1) (2005)
Keyphrases
- process control
- product quality
- data mining
- control system
- manufacturing process
- improve quality
- decision making
- control charts
- information systems
- management system
- text mining
- decision support
- rough sets
- semiconductor manufacturing
- intelligent control
- product development
- databases
- artificial neural networks
- data mining applications
- quality control
- integrated circuit
- intrusion detection
- fuzzy logic
- knowledge discovery
- high quality
- case study
- real world