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Simulation-based multi-mode resource-constrained project scheduling of semiconductor equipment installation and qualification.

Junzilan ChengJohn W. FowlerKarl G. Kempf
Published in: WSC (2012)
Keyphrases
  • human resources
  • semiconductor manufacturing
  • gallium arsenide
  • monitoring system
  • real time
  • high level
  • database server
  • plasma etching
  • information retrieval
  • genetic algorithm
  • image processing
  • working principle