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Design Optimization of CMOS- MEMS Staggered Vertical Comb Based Micro Scanners.
Wenhao Chen
Mingzheng Duan
Hadi Tavakkoli
Huahuang Luo
Bin Zhao
Wibool Piyawattanametha
Yi-Kuen Lee
Published in:
IEEE SENSORS (2022)
Keyphrases
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